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Kinetek Inspection 4.1
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Cost-effective solution Kinetek
Inspection 4.1 is a sophisticated and cost-effective wafer inspection
application that uses a wide range of inspection methods. It uses the
information in an inspection routine to navigate the wafer or substrate on
an optical microscope inspection station or an analysis tool by
controlling the tool's motorized stage. When a defect is found, the
operator can log or classify it according to type. The defect information
can be saved in a file and reviewed further using Kinemate ® Defect
Review software. |
Click thumbnail to see the full-sized image
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User-friendly Special wizards
simplify teaching wafer maps and inspection routines. The user-friendly
graphical interface will please your operators, increase their throughput,
and reduce your costs. We take advantage
of our modular software and reuse some of the tested software modules and
tools created for the popular Kinemate® defect review application. The wafer
map, navigation control, and other major components of the application
give Kinetek Inspection software the same simple and flexible user-friendly
interface that made Kinemate® so popular. |
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Imaging Options
Still images can be acquired and stored locally or on a remote network
drive. Interfaces are available for most image archiving systems and yield
management tools. "Live video in a window"
is a popular option. |
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Pre-programmable Kinetek
Inspection can use fully pre-programmed inspection routines or the
operator can make some or all of the selections at run time. Wafer and die
selection can be either fully pre-programmed, operator selected, or set
for random selection. Point to point inspections and/or scans can be
pre-programmed in any order and set to run in a continuous or paused mode.
Standard file formats- Defects can be logged and/or classified with the
press of a single button. Results can be saved in industry standard defect
file formats. |
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Versatile Kinetek Inspection
can control the stage for inspection navigation on a number of analysis
tools, such as optical microscopes on review stations, SEM, FIB, and EDS
tools. This gives you a complete, versatile application you can use
throughout your facility, whether for in-line processing or off-line
failure analysis. Choosing identical user interfaces for inspection
throughout your facility can significantly reduce operator learning curve
and confusion. |
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