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DR-300L Inspection & Defect Review Station


Newest addition to the Kinetek line The DR-300L is the newest addition to the Kinetek line of inspection and defect review stations. It is configured with a load port module for Front Opening Unified Pods (FOUPs) and accommodates wafers up to 300mm.
(This inspection station can be customized for other inspection and defect review applications.)

The DR-300L features optimum ergonomic design and user-friendly operation. It is flexible, changing easily and quickly to accommodate other sets of classification criteria as needed. The system is Semi S2/S8 certified.

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Microscopes    The station can be configured with a variety of optical microscopes using various imaging solutions, including DUV and confocul along with live video on modern, high-resolution, flat-panel displays. Unlike some of our competitors, we aren’t limited to a particular brand of microscope.

Wafer-handling hardware    The DR-300L  station can be configured with wafer-handling hardware to your specifications.

·     Scanning stage options: DC servo or linear motor with available error mapping.

·     Wafer handling options:  Single and dual-arm robots.

·     Scanning stage that allows for seamless integration to a variety of wafer loading options.

·     Optional solutions for special applications such as GaAs wafer handling.

·     Other options: Mini environment, digital image capture, live video.

Supporting control software Supporting hardware control software is developed and tested in-house on a station configured to your specifications so you are assured that your station performs as it should.
Inspection and defect review software options
When configured to your specifications and coupled with the latest Kinetek inspection or defect review software application, the DR-300 Series stations can provide you with the right solution for your optical inspection needs. The recommended Kinetek software applications for this application are: Kinetek Inspection 4.1
Kinemate Defect Review 8.0

 
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