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Hardware |
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DR-300C Inspection
& Defect Review Station
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Kinetek presents the DR-300C optical inspection and defect review station for semi-conductor wafers
up to 300mm contained in open-wafer cassettes.
(This inspection station can be customized for other inspection
and defect review applications.) Ergonomic,
user-friendly design
The DR-300C features ergonomic design and user-friendly operation.
It is
flexible, changing easily and quickly to accommodate other sets of
classification criteria as needed. The system is Semi S2/S8 certified. |
Click thumbnail to see the full-sized image
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Microscopes
The station can be
configured with a variety of optical microscopes using various imaging
solutions, including DUV and confocul along with live video on modern, high-resolution, flat-panel
displays. Unlike some of our competitors, we
aren't limited to a particular brand of microscope.
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Wafer-handling hardware The DR-300C
station can be configured with wafer-handling hardware to your
specifications.
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Scanning stage
options: DC servo or linear motor with available error mapping.
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Wafer handling
options: Single and dual-arm robots.
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Optional
solutions for special applications such as GaAs wafer handling.
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Other options:
Mini environment, digital image capture.
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| Supporting control software
Supporting hardware control software is developed and tested in-house on a station
configured to your specifications so you are assured that your station
performs as it should.
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Inspection
and defect review software options
When configured to your specifications and coupled with the latest Kinetek
inspection or defect review software application, the DR-300 Series stations can provide you
with the right solution for your optical inspection needs. The recommended
Kinetek software applications for this application are:
Kinetek Inspection 4.1
Kinemate Defect Review 8.0 |
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